■募集人数: 3


■期間: 平成30年9月12日(水)~14日(金)






(京都市左京区吉田本町 吉田キャンパス内 工学部物理系校舎3階327号および実験室)




第1日目  9月12日(水) (10時30分から開始)

① 全体スケジュール説明、安全教育 

② スパッタ装置によるPZT成膜 (成膜の待ち時間内に講義)


第2日目  9月13日(木)

③ X線回折装置による結晶構造解析

④ SEMによる薄膜構造観察

⑤ 上部電極形成(真空蒸着装置) 


第3日目  9月14日(金)

⑥ 強誘電体評価システムによるPEループ測定

⑦ データ整理およびまとめ









FY 2018 Nanotech Career-up Alliance

Piezoelectric Materials Device Course <<short term type>>


■ Purpose and intended persons:

Piezoelectric Pb(Zr,Ti)O3 thin films has been actually used for the MEMS device such as gyro sensors and inkjet printers. However the use of toxic lead has restricted in the world, development of lead free piezoelectric thin films has been anticipated.  In this curse, participants take a lecture of basis of piezoelectric materials, and practical experiment of (Ka,Na)NbO3 thin films deposition by sputtering, evaluation technique by X-ray diffractometer and PE hysteresis measuring system.


■ Number of participants: 3persons (maximum)

■ Time and period: From Setember 12 (Wed) to 14 (Fri), 2018

■ Venue: Kyoto University Nanotechnology Hub (* Yoshida Campus, Kyoto University)



■ Schedule:

Day 1 – Setember 12 (Wed)  (10:30 am start)

[1] Guidance

[2] PZT thin films deposition by RF magnetron sputtering

We will lecture on basic study on piezoelectric material during waiting time of sputtering(2h).


Day 2 – Setember 13 (Thu)

[3] Crystal structure analysis by X-ray diffractometer

[4] Observation of surface and/or cross section of PZT thin film by SEM

[5] Deposition of upper electrode by thermal evaporator


Day 3 – Setember 14 (Fri)

[6] Evaluation of PE-hysteresis loop of PZT thin film by piezoelectric measuring system.

[7] Summarizing


■ Tuition:

Free of charge for the doctoral students and young researchers belonging to CUPAL Alliance institutions

Others: 250,000 yen (* Not including consumption tax)


■ Contact: Kyoto University Nanotechnology Hub

(kyodai-hub@saci.kyoto-u.ac.jp  Phone: +81-75-753-5231)