■募集人数: 3

■期間: 平成30年10月17日(水)~10月19日(金)


■会場: 京都大学ナノテクノロジーハブ拠点

(京都市左京区吉田本町 京都大学吉田キャンパス内 工学部物理系校舎3階327号)





1日目  10月17日(水)

① 講習会のスケジュール、MEMS技術を用いたマイクロ流路作製についての概要説明

② 簡易CADソフト(Layout editor)により各自の工夫をこらした簡単なマイクロ流路データを作成

③ マイクロ流路設計データに基づきフォトマスクを作成。


2日目   10月18日(木)

④ 厚膜レジストを用いてフォトリソグラフィーによりマイクロ流路パターン原盤を作成

⑤ PDMS(シリコーンゴム)を調合し原盤に流し込み熱硬化してPDMS流路を作成


3日目  10月19日(金)

⑥ マイクロ流路が形成されたPDMSを加工し、レジスト原盤の出来上がりをディジタル顕微鏡による観察と

レジスト高さ測定を 表面段差計を用いて行う

⑦ チューブ、治具等を取り付けてマイクロ流路デバイスシステムを組み立てたのち、液体(インク)を実際に流路に流し込み、2流体が二層流から管路途中で混ざり合うのを確認する







■連絡先: 京都大学ナノテクノロジーハブ拠点

(kyodai-hub@saci.kyoto-u.ac.jp、電話:075-753-5231 )

FY 2018 Nanotech Career-up Alliance

Kyoto University, Laboratory Course of Micro Fluidic Device Fabrication << Short-term type >>


■ Purpose and intended persons:

In various fields such as medical and biological science and so on, micro fluidic devices are applied for drug development, biological science and bio-sensor. This course is held for researchers of enterprise, research institute and university including student to learn the MEMS basic technology fabricating the micro fluidic devices. The participants will use mainly Nonotechnology Hub’s photolithography process including cutting edge equipment and tools to fabricate the micro fluidic device which works for 2 liquids mixing and finally evaluate it.


■ Number of participants: 3 persons (maximum)

■ Time and period: October 17 (Wed) to October 19 (Fri) , 2018

■ Venue: Kyoto University Nanotechnology Hub (* Yoshida Campus, Kyoto University)



■ Contents:

Day 1 – October 17 (Wed)

[1] Introduction of the program schedule and outline of the micro fluid device fabrication using MEMS technology

[2] Designing micro fluid device and make the pattern data by CAD soft (L-Edit).

[3] Fabrication of photo-mask based on micro fluid device CAD data.


Day 2 – October 18 (Thu)

[4] Fabrication of the photo resist master for micro fluid device using photolithography.

[5] Mixing up of PDMS and forming the PDMS micro fluid using the resist master.


Day 3 – October 19 (Fri)

[6] Processing the PDMS micro fluid device and observe the photo resist master micro fluid and measure the resist height corresponded to micro fluid depth.

[7] Attaching the tubes and small tools to the micro fluid device and observe

[8] Observation of 2 fluids behavior through designed micro fluid channel


■ Tuition:

Free of charge for the doctoral students and young researchers belonging to CUPAL Alliance institutions

Others: 250,000 yen (* Not including consumption tax)


■ Contact: Kyoto University Nanotechnology Hub

(kyodai-hub@saci.kyoto-u.ac.jp  Phone: +81-75-753-5231)